Research and Programs: Bio/Neuro Implants Bio/Chem/Rad Sensors Robotics and Sensor Fusion Energy Educational Programs
     
  SSIM Electronic Materials Integrated Technology (EMIT) Laboratory

This cutting edge laboratory focuses on the research and development of important electronic and photonic materials, and the processing and micromachining of micro- and nanostructures and devices. Equipment

  • Lambda Physik LPX 200 and 300 Excimer Lasers integrated with two pulse-laser deposition UHV systems and an ultra-high precision micromachining setup
  • Pulse-laser deposition chamber for oxide film growth
  • Pulse-laser deposition chamber for pure metal and nitride growth
  • Excimer laser micromachining optical bench, which includes precise-beam homogenization and attenuation. The sample step and repeat stage has optically encoded 25-nanometer XYZ beta and rocking resolution. The Excimer laser micromachining system is housed in a class-10 clean room
  • Ultra-high-vacuum balanced magnetron-sputtering system with microwave radical injector system for development of metal oxide films at low temperatures
  • Ultra-high-vacuum multitarget sputtering system with rotating sample palette for precision thin-film multilayer deposition
  • Ultra-high-vacuum plasma source molecular beam epitaxy (PSMBE) for nitride growth